TESCOM™ 12 Series Springless Regulators

TESCOM™ Series 12 Springless and Threadless Regulators

The Series 12 is a micro – type ultra – high – purity industrial gas (IGS) / VCR® pressure – reducing regulator. The Series 12 provides a finish of 5 Ra or 10 Ra micro – inches. It adopts a bellows diaphragm and has an internal design without springs and threads. The inlet pressure is 150 psig / 10.3 bar, and the outlet pressure is 250 mm Hg – 15, 30, 60, 100 psig / 250 mm Hg – 1.0, 2.1, 4.1, 6.9 bar. The flow rate can reach 120 SLPM. It is very suitable for OEM tools, gas cylinders and low – pressure gas cylinders.

Specifications
Set Pressure
Maximum inlet pressure: 150 psig / 10.3 bar
Maximum outlet pressure: 250 mm Hg – 15 psig / 250 mm Hg – 1.0 bar; 0 – 30, 0 – 60, 0 – 100 psig / 0 – 2.1, 0 – 4.1, 0 – 6.9 bar
Material
Valve body: 316L VAR stainless steel
Diaphragm: Hastelloy®
Valve seat: PCTFE
Valve stem: Hastelloy®
Other component materials: 316L VAR stainless steel
Operating Temperature: – 40°F to 140°F / – 40°C to 60°C
Connectors
Welded: 1/4″ VCR® or tube fittings
Surface mount: 1.125″ or 1.50″ footprint
Flow Capacity
Standard: Cv = 0.04
High flow: Cv = 0.08
Weight
VCR®, IGS: 0.60 lb / 0.3 kg
Type A: 1.08 lb / 0.5 kg

Features
Ideal for high – end OEM gas systems
High – sensitivity pressure control enhances mass flow controller (MFC) performance
Wide application range and excellent performance
Flow rate: 2 SCFM to 120 SLPM
Provides excellent tightness and repeatability in micro – components
Metal – to – metal sealing is adopted between the diaphragm and the valve body, providing first – class tightness
The internal surface finish is 10 Ra or 5 Ra micro – inches
Complies with SEMI F19 and SEMI modular interface specifications